TY JOUR TI The role of chemical processes in the technological treatment of gallium arsenide under conditions of low-temperature non-equilibrium plasma reduced pressure in chlorine KW process KW stages KW etching KW concentration KW particles KW recombination KW plasma JO From Chemistry Towards Technology Step-By-Step AU Sitanov, D.V. PY 2021 IS 2 PB Yaroslavl State Technical University